Tus tub ntxhais ntawm CCD (them nyiaj {{{- Cov ntsiab lus sib xyaw ua ke nyob rau hauv kev tsim khoom siv thev naus laus zis hauv cov tshuab semiconductor hauv cov thev naus laus zis thiab kho qhov muag enterical. CCD nti tsim kho yog qhov tseem ceeb tshaj plaws hauv kev txiav txim siab lub koob yees duab kev ua tau zoo, thiab nws cov txuj ci ncaj qha cuam tshuam cov duab zoo ntawm cov khoom kawg.
Kev tsim khoom ntawm CCD sensor pib nrog kev npaj ntawm qhov siab {{purity ib {}}} Crystal Silicon Wafer. Ib qho kev cuam tshuam silicon nrog tus nqi tsawg kawg nkaus yog zus siv czochralski txoj kev. Tom qab slicing thiab polishing, nws tsim wafer substrate kwv yees li 0.5 hli tuab. Thaum lub sij hawm oxidation oxidation, cov kab ke oxidation, txheej txheem dioxide insulating txheej ntawm silicon saum npoo, ua hauj lwm raws li lub hauv paus rau kev sib cais tom qab. Photolithogy siv tob ultraviolet lithography hloov cov qauv tsim nrog nanometer {}} coated wafer nto. Ion Kev tsis pom zoo yog tom qab siv los ua PN sib tshuam photodiode array. Cov micron -} qhov loj me duab cov ntsiab lus ua cov qauv tseem ceeb rau cov duab ntes.
Cov hlau interconnect txheej yog tsim siv ib tug txheej txheem multilayer aluminium lossis tooj liab etching tsim teeb liab sib kis tav toj hauv kev da dej insulit. Tus yuam sij tshiab dag nyob rau hauv kev tsim ntawm qhov hloov chaw them lub channel. Cov txheej txheem doping tshwj xeeb tsim cov qauv zoo nyob hauv silicon crystal, ua kom cov kab {}} txoj kab kev hloov pauv ntawm cov ntawv sau rau cov zis nthuav dav. Txheej passivation, ua los ntawm silicon nitride, cov ntaub ntawv tuab tiv thaiv zaj duab xis los ntawm kev tso tshuaj lom neeg tshuaj lom neeg, kom paub meej cov khoom ruaj khov rau hauv cov chaw muaj kev ruaj khov.
Cov txheej txheem ntim ncaj qha ncaj qha cuam tshuam CCD cov lus pom zoo. Tom qab dicing, lub nti tau ntim rau hauv cov ceramic lossis hlau pob, nrog cov hluav taws xob sib txuas tiav los ntawm cov xaim xaim kub. Lub hauv ntej lub qhov rai tshiab sib xyaw ua ke infrared CutOff lim nrog qhov qis-}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}} Cov lus teb pom kev zoo. Siab -}}}}}} teev ntim tshuab hluav taws xob ncaj qha rau cov nplaim hluav taws xob, txo qis ntaus ntawv loj.
Niaj hnub CCD niaj hnub thev naus laus zis yog evolving rau nram qab - illuminated qauv qauv. Los ntawm flipping tus qauv kev cai kom tso cai teeb kom ua rau muaj qhov tseeb ntawm cov duab ntsej muag, quantum efficiency yog nce li 90%. Nanoimprint lasraphy yog pib siv rau hauv kev tsim cov micolens arrays rau kev txhim kho lub teeb ua tau zoo. Cov txheej txheem kev nce qib txuas ntxiv mus tsav cov xwm txheej ntawm CCDs hauv cov liaj teb tshwj xeeb xws li kev soj ntsuam txuj ci tshwj xeeb thiab kev soj ntsuam kev lag luam.
